These are generic design rules. For TSMC02d, you need to use the rule numbers in the DEEP column and multiply the values by λ=0.09μm.
| Rule | Description | Lambda | ||
|---|---|---|---|---|
| SCMOS | SUBM | DEEP | ||
| 1.1 | Minimum width | 10 | 12 | 12 |
| 1.2 | Minimum spacing between wells at different potential | 9 | 18 | 18 |
| 1.3 | Minimum spacing between wells at same potential | 6 | 6 | 6 |
| 1.4 | Minimum spacing between wells of different type (if both are drawn) | 0 | 0 | 0 |
