These are generic design rules. For TSMC02d, you need to use the rule numbers in the DEEP column and multiply the values by λ=0.09μm.
Rule | Description | Lambda | ||
---|---|---|---|---|
SCMOS | SUBM | DEEP | ||
4.1 | Minimum select spacing to channel of transistor to ensure adequate source/drain width | 3 | 3 | 3 |
4.2 | Minimum select overlap of active | 2 | 2 | 2 |
4.3 | Minimum select overlap of contact | 1 | 1 | 1.5 |
4.4 |
Minimum select width and spacing (Note: P-select and N-select may be coincident, but must not overlap) (not illustrated) |
2 | 2 | 4 |