SCMOS Layout Rules - Select

These are generic design rules. For TSMC02d, you need to use the rule numbers in the DEEP column and multiply the values by λ=0.09μm.

Rule Description Lambda
SCMOS SUBM DEEP
4.1 Minimum select spacing to channel of transistor to ensure adequate source/drain width 3 3 3
4.2 Minimum select overlap of active 2 2 2
4.3 Minimum select overlap of contact 1 1 1.5
4.4 Minimum select width and spacing
(Note: P-select and N-select may be coincident, but must not overlap) (not illustrated)
2 2 4