MOSIS SCMOS

SCMOS Layout Rules - Poly

These are generic design rules. For TSMC02d, you need to use the rule numbers in the DEEP column and multiply the values by λ=0.09μm.

Rule Description Lambda

SCMOS SUBM DEEP

3.1 Minimum width 2 2 2

3.2 Minimum spacing over field 2 3 3

3.2.a Minimum spacing over active 2 3 4

3.3 Minimum gate extension of active 2 2 2.5

3.4 Minimum active extension of poly 3 3 4

3.5 Minimum field poly to active 1 1 1

Rule	Description	Lambda
Rule	Description	SCMOS	SUBM	DEEP
3.1	Minimum width	2	2	2
3.2	Minimum spacing over field	2	3	3
3.2.a	Minimum spacing over active	2	3	4
3.3	Minimum gate extension of active	2	2	2.5
3.4	Minimum active extension of poly	3	3	4
3.5	Minimum field poly to active	1	1	1