SCMOS Layout Rules - Via5 (SUBM and DEEP)

These are generic design rules. For TSMC02d, you need to use the rule numbers in the DEEP column and multiply the values by λ=0.09μm.


Vias must be drawn orthogonal to the grid of the layout. Non-Manhattan vias are not allowed.

Rule Description Lambda
6 Metal Process
SCMOS SUBM DEEP
29.1 Exact size n/a 3 x 3 4 x 4
29.2 Minimum spacing n/a 4 4
29.3 Minimum overlap by Metal5 n/a 1 1

 

SCMOS Layout Rules - Metal6 (SUBM and DEEP)

These are generic design rules. For TSMC02d, you need to use the rule numbers in the DEEP column and multiply the values by λ=0.09μm.

Any designer using the SCMOS rules who wants the TSMC Thick_Top_Metal must draw the top metal to comply with the TSMC rules for that layer.

Rule Description Lambda
6 Metal Process
SCMOS SUBM DEEP
30.1 Minimum width n/a 5 5
30.2 Minimum spacing to Metal6 n/a 5 5
30.3 Minimum overlap of Via5 n/a 1 2
30.4 Minimum spacing when either metal line is wider than 10 lambda n/a 10 10