These are generic design rules. For TSMC02d, you need to use the rule numbers in the DEEP column and multiply the values by λ=0.09μm. Also, use 6+ Metal process rules.
Vias must be drawn orthogonal to the grid of the layout. Non-Manhattan vias are not allowed.
| Rule | Description | Lambda | |||||
|---|---|---|---|---|---|---|---|
| 5 Metal Process | 6+ Metal Process | ||||||
| SCMOS | SUBM | DEEP | SCMOS | SUBM | DEEP | ||
| 25.1 | Exact size | n/a | 2x2 | 3x3 | n/a | 2x2 | 3x3 |
| 25.2 | Minimum spacing | n/a | 3 | 3 | n/a | 3 | 3 |
| 25.3 | Minimum overlap by Metal4 | n/a | 1 | 1 | n/a | 1 | 1 |
These are generic design rules. For TSMC02d, you need to use the rule numbers in the DEEP column and multiply the values by λ=0.09μm. Also, use 6+ Metal process rules.
| Rule | Description | Lambda | |||||
|---|---|---|---|---|---|---|---|
| 5 Metal Process | 6+ Metal Process | ||||||
| SCMOS | SUBM | DEEP | SCMOS | SUBM | DEEP | ||
| 26.1 | Minimum width | n/a | 4 | 4 | n/a | 3 | 3 |
| 26.2 | Minimum spacing to Metal5 | n/a | 4 | 4 | n/a | 3 | 4 |
| 26.3 | Minimum overlap of Via4 | n/a | 1 | 2 | n/a | 1 | 1 |
| 26.4 | Minimum spacing when either metal line is wider than 10 lambda | n/a | 8 | 8 | n/a | 6 | 8 |