These are generic design rules. For TSMC02d, you need to use the rule numbers in the DEEP column and multiply the values by λ=0.09μm.
| Rule | Description | Lambda | ||
|---|---|---|---|---|
| SCMOS | SUBM | DEEP | ||
| 7.1 | Minimum width | 3 | 3 | 3 |
| 7.2 | Minimum spacing | 2 | 3 | 3 |
| 7.3 | Minimum overlap of any contact | 1 | 1 | 1 |
| 7.4 | Minimum spacing when either metal line is wider than 10 lambda | 4 | 6 | 6 |