#some set stuff
set echo
option quiet
mode one.dim

#the vertical definition
line x loc = 0     spacing = 0.02 tag = top
line x loc = 0.50  spacing = 0.02
line x loc = 2.0   spacing = 0.25 tag=bottom

#the silicon wafer
region silicon xlo = top xhi = bottom

#set up the exposed surfaces
bound exposed  xlo = top  xhi = top

#calculate the mesh
init boron conc=1.0e14

#the pad oxide
deposit oxide thick=0.075

#the uniform boron implant
implant boron dose=3e14 energy=70 pearson

#plot the initial profile
sel z=log10(boron)
plot.1d x.ma=2.0 y.mi=14.0 y.max=20.0

#the diffusion card
diffuse time=30 temp=1100 

#save the data
structure out=boron.str

#plot the final profile
sel z=log10(bor)
#plot.1d x.max=2.0 y.min=14.0 y.max=20
plot.1d cle=f axi=f

