1.

Consider a p-type substrate with bulk concentration CB = 1E16 cm^-3.
After a phosphorus (P) predeposition at 1000 C for 60 minutes,
what is (a) the junction depth xj, and (b) the total dose Q?

For the above problem, use Irwin's curves to estimate the average resistivity, rho-bar.
Based on this average resistivity and the junction depth calculated above, what is the sheet resistivity (rho-sheet) that you would expect to measure with a 4-point probe?

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