TK 7871 .99 .M44 T38 1998 Yuan Taur, Tak H. Ning, 1

Fundamentals of modern VLSI devices,

TK7874 .G473 1994 Sorab K. Ghandhi, - VLSI Fabrication Principles, 2nd ed. 1

TK7874 .G473 1983 Sorab K. Ghandhi, - VLSI Fabrication Principles, 1

TK7871.85.C65.A56.1990 G.E. Anner, Planar Processing Primer 1

TK7874 .Q38 1985 W.E. Beadle, J.C.C. Tsai, R.D. Plummer, eds. 1

Quick reference manual for silicon integrated circuit tech.

TK7874.M37 C. Mead and L. Conway, Introduction to VLSI Design 1

TK7874 .V566 1983 S.M. Sze, - VLSI Technology 1

TK7871.85 .G7 A.S. Grove,

Physics & Technology of Semiconductor Devices 1

TK7874 .E49 1989 David J. Elliott, - Integrated circuit fabrication technology 1

TK7874 .J33 1988 R.C. Jaeger, - Introduction to Microelectronic Fabrication 1

(Modular Series), reprinted 1993

TK7874 .R87 1987 W. Scot Ruska, - Microelectronic Processing 1

not available for reserve, but good sources of information:

TK7874 .R87 1987 D.K. Reinhard, - Introduction to Integrated Circuit Eng. 1

TK7874 .R87 1987 Douglas J. Hamilton and William G. Howard 1

Basic Integrated Circuit Engineering

TK7874 .R87 1987 E.D. Fabricius, - Introduction to VLSI Design 1

TK7874 .R87 1987 J. P. Uyemura, Physical Design of CMOS 1

Integrated Circuits Using L-Edit