ELEG 450/650 Integrated Circuit Design and Fabrication
Homework #14 - due Wednesday, 16 May, 2001
1.
Use the SUPREM process modeling software to determine the
SiO2 thicknesses obtained after: 6 hours of dry
oxidation of
Si (100)-oriented at 1100 C; the initial conidition is dox = 0.
Compare your calculations to the graphs in the text(and give this graphical value).
For proper credit, include the course number, assignment number, and
due
date and your name on your submission.