1.
Consider a p-type
substrate with bulk concentration CB = 1E16 cm^-3.
After
a phosphorus (P) predeposition at 1000 C for 60 minutes,
what is (a) the
junction depth xj, and (b) the total dose Q?
For the above problem, use Irwin's curves to estimate the average resistivity,
rho-bar.
Based on this average resistivity
and the junction depth calculated above, what is the sheet resistivity
(rho-sheet) that you would expect to
measure with a 4-point probe?
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