In this lesson, we will go through the steps of creating
Transmission Line Method test patterns. Our goal to
eventually create a mask, or have TLM patterns available
as instance for future designs.
FIGURE 9: TLM PATTERNS
Begin by opening the layout window for scratch. Zoom out
four times. The major and minor grid markings should disappear.
Go to the LSW. Select nwell.
In the editing window, select create--rectangle. Pick a point
near the left side of the window to start your design. As
you move the mouse,
look at the column at the top of the window. You see:
X: ------ Y: ------ (F) Select: 0 dx: ----- dY: ----
Dist: ----
When you initiate the rectangle, notice that the dX: and dY:
jump to 0.0. As you move the mouse away, these magnitudes
increase. When dX reads 632, and dY is 390, click so that the
rectangle is drawn.
Since TLM patterns are used to measure the contact resistance,
we must add contact cuts as well. Select cont.
We are going to draw a series of contact pads which are 80x80
microns in dimension. Near the top of the nwell, draw an 80x80
square of cont.
Select edit--copy (or type "c"). Place the copy so that it
is 5 microns away from the previous contact. Make 4 more
copies, and place each at 10,15,20, and 25 microns from its
predecessor respectively.
Now, select ALL of the contact pads at the same time. We are
going to repeat this pattern 4 times. Hit "c" for copy, and
make your reference point the lower left corner of the row.
Place the copy directly below the original row. Do this two more
times.
The final step in the design is the addition of a metalization
region. Change the layer to metal1, and repeat the process
described for the contact cuts so that each contact square
is covered by an 80x80 square of metal1.
At this point, we would like to save the scratch layout
we have been working on as "TLM". Click on Design--Save As.
When the Save As form appears, type TLM in the cell name.
Close the scratch window. Take care to NOT save this as scratch.
In the library browser, select TLM layout. Only a version
0.0 should be present. Select edit as earlier. Your
saved design is on the screen.
Before we update this to a version 0.1, we should move
the origin out of the window so that it is not in our printouts.
Select Misc--Move Origin. An outline of the axes follows
the mouse. Close to one of the corners, click the left
buttons to confirm the placement.
Now, close this window. Agree to saving any changes made.
Return to the Library Browser. Move the mouse to the word
tutorial, and click with the middle button. A drop down
menu appears. Choose "Show Checkouts". A form appears
with all the files you have saved. Click the box next to
TLM layout 0.0 (today's date). Then click OK. In the
library browser, click on TLM--layout. A version 0.1 is
now present.
****Whenever you have completed a design you should
****check it in to an updated version. Otherwise,
***you will not be able to use it as an instance.
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