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DEVICE PROCESSING RECIPES AND DATASHEETS  
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DEVICE PROCESSING RECIPES AND DATASHEETS

DataSheets

Recipes
AZ 300 MIF Developer / AZ 300 MIF Developer p-InGaN activation for 700C growth temperature
AZ 400K, 351, 421K Developer / AZ 400K and 421K Developer p-GaN activation
Shipley Megaposit MF - 700 Developer  
Microposit MF-319 Developer Metal and Semiconductor Etching
Microposit MF-321 Developer  
Microposit MF-351 Developer S1813 Positive Resist / MF 321 Developer (1:5::Develoer:DI water)
Futurrex Resist Developer RD6  
AZ 5200 i-line Photoresist / AZ 5200 i-line Photoresist  
AZ 5214 E Photoresist  
Futurrex NR7-1500P Photoresist  
   
   
   
   
   
   
   
   
   
   
   
   
   
   
   
   
   
   
   
   
   
   
   
   
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